ACM Research Adds 70% Acid Recycling to Hot SPM System
ACM Research introduced a 170°C single-wafer Hot SPM system with 70% sulfuric acid recycling, validated across more than 50 process layers at a foundry customer.
ACM Research introduced a 170°C single-wafer Hot SPM system with 70% sulfuric acid recycling, validated across more than 50 process layers at a foundry customer.