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ASML and TSMC sign pact to develop 12-inch photomasks

ASML struck an agreement with Taiwan Semiconductor Manufacturing Company to develop larger-format photomasks for chipmaking, including 12-inch masks, for the industry’s transition toward larger Extreme Ultraviolet lithography.

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ASML Holding struck a deal with Taiwan Semiconductor Manufacturing Company to develop larger-format photomasks used in chipmaking. The semiconductor companies said they signed an agreement to develop 12-inch masks and to lead the industry's transition toward larger Extreme Ultraviolet lithography masks.